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Inventor
SHIN HEUNG HYUN
KR
2 patents
⚠️ This page may combine multiple inventors who share the name “SHIN HEUNG HYUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LEE KI HUN
1 patent
US8873067B2
Oct 28, 2014
Interferometer for TSV measurement and measurement method using same
LEE KI HUN
25 citations
84
SHIN HEUNG HYUN
1 patent
US8416293B2
Apr 9, 2013
Plasma monitoring device and method
SHIN HEUNG HYUN
0 citations
38