Inventor

NAOYA INOUE

KR2 patents

Patents

2 patents

US9929099B2Mar 27, 2018

Planarized interlayer dielectric with air gap isolation

SAMSUNG ELECTRONICS CO LTD7 citations82

US10186485B2Jan 22, 2019

Planarized interlayer dielectric with air gap isolation

SAMSUNG ELECTRONICS CO LTD0 citations51