Inventor
L'HEUREUX JAMES
US11 patents
Patents
11 patentsUS10187966B2Jan 22, 2019
Method and apparatus for gas abatement
APPLIED MATERIALS INC8 citations81
US10889891B2Jan 12, 2021
Apparatus for gaseous byproduct abatement and foreline cleaning
APPLIED MATERIALS INC3 citations70
US10757797B2Aug 25, 2020
Method and apparatus for gas abatement
APPLIED MATERIALS INC1 citations60
US11551917B2Jan 10, 2023
Reduction of Br2 and Cl2 in semiconductor processes
APPLIED MATERIALS INC0 citations59
US10861681B2Dec 8, 2020
Apparatus for collection and subsequent reaction of liquid and solid effluent into gaseous effluent
APPLIED MATERIALS INC1 citations58
US9022715B2May 5, 2015
Load lock chamber designs for high-throughput processing system
APPLIED MATERIALS INC2 citations58
US12573594B2Mar 10, 2026
Protective liner for plasma source
APPLIED MATERIALS INC0 citations57
US12442074B2Oct 14, 2025
System and method for controlling foreline pressure
APPLIED MATERIALS INC0 citations52
US10435787B2Oct 8, 2019
Hydrogen partial pressure control in a vacuum process chamber
APPLIED MATERIALS INC0 citations51
US12560951B2Feb 24, 2026
Smart manufacturing solutions for wastewater treatment
APPLIED MATERIALS INC0 citations45
US12203828B2Jan 21, 2025
Method and system for detecting anomalies in a semiconductor processing system
APPLIED MATERIALS INC0 citations43