Inventor
SONNTAG DAG
NL5 patents
Patents
5 patentsUS12045555B2Jul 23, 2024
Method to label substrates based on process parameters
ASML NETHERLANDS BV0 citations60
US11714357B2Aug 1, 2023
Method to predict yield of a device manufacturing process
ASML NETHERLANDS BV0 citations59
US11086229B2Aug 10, 2021
Method to predict yield of a device manufacturing process
ASML NETHERLANDS BV1 citations59
US11099485B2Aug 24, 2021
Maintaining a set of process fingerprints
ASML NETHERLANDS BV0 citations57
US12353967B2Jul 8, 2025
Method and apparatus for determining feature contribution to performance
ASML NETHERLANDS BV0 citations53