Inventor
DE RUITER CHRISTIAAN THEODOOR
NL3 patents
Patents
3 patentsUS11714357B2Aug 1, 2023
Method to predict yield of a device manufacturing process
ASML NETHERLANDS BV0 citations59
US11086229B2Aug 10, 2021
Method to predict yield of a device manufacturing process
ASML NETHERLANDS BV1 citations59
US10816907B2Oct 27, 2020
Method for determining an optimized set of measurement locations for measurement of a parameter of a lithographic process, metrology system and computer program products for implementing such methods
ASML NETHERLANDS BV1 citations57