Inventor

CHAO TZU-ANG

TW12 patents

Patents

12 patents

US11860534B2Jan 2, 2024

Pellicle for an EUV lithography mask and a method of manufacturing thereof

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations74

US12174526B2Dec 24, 2024

Pellicle for an EUV lithography mask and a method of manufacturing thereof

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72

US11824106B2Nov 21, 2023

Semiconductor device and method of fabricating the same

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72

US11239354B2Feb 1, 2022

Semiconductor device and method of fabricating the same

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72

US12265323B2Apr 1, 2025

Pellicle for an EUV lithography mask and a method of manufacturing thereof

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US12166113B2Dec 10, 2024

Semiconductor device and method of fabricating the same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US11854895B2Dec 26, 2023

Transistors with channels formed of low-dimensional materials and method forming same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US12151213B2Nov 26, 2024

Method of manufacturing semiconductor devices including the steps of removing one or more of the nanotubes from the stack of nanotubes, and/or removing spacers that surrounds each of the plurality of nanotubes, and forming gate dielectric and/or gate electrode to the nanotubes

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60

US11749528B2Sep 5, 2023

Method of manufacturing semiconductor devices including the steps of removing a plurality of spacers that surrounds each of the plurality of nanotubes into a layer of nanotubes, and forming gate dielectric and/or gate electrode

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60

US11342181B2May 24, 2022

Semiconductor devices and methods of manufacture

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60

US11417729B2Aug 16, 2022

Transistors with channels formed of low-dimensional materials and method forming same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52

US12439650B2Oct 7, 2025

CMOS fabrication methods for back-gate transistor

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51