Inventor

LEHN JEAN-SÉBASTIEN

US3 patents

Patents

3 patents

US11230764B2Jan 25, 2022

Methods of atomic layer deposition for selective film growth

MERCK PATENT GMBH5 citations69

US12448681B2Oct 21, 2025

Methods of forming molybdenum-containing films deposited on elemental metal films

MERCK PATENT GMBH0 citations59

US12590374B2Mar 31, 2026

Selective thermal atomic layer etching

MERCK PATENT GMBH0 citations36