Inventor

PORE VILJAMI

FI69 patents

⚠️ This page may combine multiple inventors who share the name “PORE VILJAMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PORE VILJAMI

ASM IP HOLDING BV

Si precursors for deposition of SiN at low temperatures

Method and apparatus for filling a gap

Deposition of SiN

Si precursors for deposition of SiN at low temperatures

Method and apparatus for filling a gap

Si precursors for deposition of SiN at low temperatures

Method and apparatus for filling a gap

Selective layer formation using deposition and removing

Si precursors for deposition of SiN at low temperatures

Deposition of SiN

Si precursors for deposition of SiN at low temperatures

Deposition of boron and carbon containing materials

Uniform deposition of SiOC on dielectric and metal surfaces

Deposition of SiN

Synthesis and use of precursors for ALD of group VA element containing thin films

Deposition of boron and carbon containing materials

Deposition of boron and carbon containing materials

Atomic layer deposition of silicon carbon nitride based materials

Selective PEALD of oxide on dielectric

Selective PEALD of oxide on dielectric

Methods for forming a layer comprising a condensing and a curing step

Si precursors for deposition of SiN at low temperatures

Si precursors for deposition of SiN at low temperatures

Synthesis and use of precursors for ALD of group VA element containing thin films

Method and apparatus for filling a gap

Atomic layer deposition of silicon carbon nitride based materials

Deposition of boron and carbon containing materials

Atomic layer deposition of silicon carbon nitride based materials

Atomic layer deposition of silicon carbon nitride based materials

Synthesis and use of precursors for ALD of group VA element containing thin films

Selective passivation and selective deposition

Cyclical deposition method and apparatus for filling a recess formed within a substrate surface

Cyclical deposition method and apparatus for filling a recess formed within a substrate surface

Method and apparatus for filling a recess formed within a substrate surface

Methods and systems for depositing a layer

Methods and systems for filling a gap

Method and apparatus for filling a gap

Multiple-layer method and system for forming material within a gap

Silicon precursors for silicon nitride deposition

Method and apparatus for filling a gap

Method and apparatus for filling a gap

Method and apparatus for filling a gap

Si precursors for deposition of SiN at low temperatures

ASM INT NV

Synthesis and use of precursors for ALD of tellurium and selenium thin films

Synthesis and use of precursors for ALD of tellurium and selenium thin films

Synthesis and use of precursors for ALD of tellurium and selenium thin films

Synthesis and use of precursors for ALD of tellurium and selenium thin films

Methods for forming conductive titanium oxide thin films

PORE VILJAMI

Synthesis and use of precursors for ALD of group VA element containing thin films

Synthesis and use of precursors for ALD of tellurium and selenium thin films