Inventor
VAN AERDE STEVEN R A
BE11 patents
⚠️ This page may combine multiple inventors who share the name “VAN AERDE STEVEN R A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
8 patentsUS9812320B1Nov 7, 2017
Method and apparatus for filling a gap
ASM IP HOLDING BV475 citations98
US9837271B2Dec 5, 2017
Process for forming silicon-filled openings with a reduced occurrence of voids
ASM IP HOLDING BV2 citations72
US10460932B2Oct 29, 2019
Semiconductor device with amorphous silicon filled gaps and methods for forming
ASM IP HOLDING BV3 citations71
US12525449B2Jan 13, 2026
Method and apparatus for filling a gap
ASM IP HOLDING BV0 citations62
US11610775B2Mar 21, 2023
Method and apparatus for filling a gap
ASM IP HOLDING BV0 citations62
US9443730B2Sep 13, 2016
Process for forming silicon-filled openings with a reduced occurrence of voids
ASM IP HOLDING BV1 citations51
US9343304B2May 17, 2016
Method for depositing films on semiconductor wafers
ASM IP HOLDING BV0 citations48
US10453685B2Oct 22, 2019
Forming semiconductor device by providing an amorphous silicon core with a hard mask layer
ASM IP HOLDING BV0 citations40