Inventor

SONG WOEI JI

CN3 patents

⚠️ This page may combine multiple inventors who share the name “SONG WOEI JI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SEMICONDUCTOR MFG INT SHANGHAI

2 patents

US7629673B2Dec 8, 2009

Contact etch stop film

SEMICONDUCTOR MFG INT SHANGHAI2 citations56

US7939915B2May 10, 2011

Contact etch stop film

SEMICONDUCTOR MFG INT SHANGHAI0 citations45

TAIWAN SEMICONDUCTOR MFG

1 patent

US5915202AJun 22, 1999

Blanket etching process for formation of tungsten plugs

TAIWAN SEMICONDUCTOR MFG4 citations58