Inventor

KIM MINSHIK

KR3 patents

⚠️ This page may combine multiple inventors who share the name “KIM MINSHIK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KIM MINSHIK

1 patent

US8652296B2Feb 18, 2014

Side gas injector for plasma reaction chamber

KIM MINSHIK5 citations62

LEE BYOUNGIL

1 patent

US8398783B2Mar 19, 2013

Workpiece de-chucking device of plasma reactor for dry-cleaning inside of reaction chamber and electrostatic chuck during workpiece de-chucking, and workpiece de-chucking method using the same

LEE BYOUNGIL6 citations61

JANG HYEOKJIN

1 patent

US8323522B2Dec 4, 2012

Plasma reactor and etching method using the same

JANG HYEOKJIN1 citations39