Inventor
MASUNAGA TAKAHIRO
JP5 patents
Patents
5 patentsUS10840213B2Nov 17, 2020
Bonding system
TOKYO ELECTRON LTD7 citations78
US10340248B2Jul 2, 2019
Bonding systems
TOKYO ELECTRON LTD4 citations71
US10424502B2Sep 24, 2019
Substrate transfer device and bonding system
TOKYO ELECTRON LTD4 citations69
US9741595B2Aug 22, 2017
Bonding method, storage medium, bonding apparatus and bonding system
TOKYO ELECTRON LTD6 citations68
US9401291B2Jul 26, 2016
Coating apparatus
TOKYO ELECTRON LTD6 citations65