Inventor
SOH SANG-YOON
KR7 patents
⚠️ This page may combine multiple inventors who share the name “SOH SANG-YOON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
6 patentsUS9812372B2Nov 7, 2017
Electrostatic chuck assembly, semiconductor manufacturing apparatus having the same, and method of measuring temperature of electrostatic chuck
SAMSUNG ELECTRONICS CO LTD319 citations94
US10474184B2Nov 12, 2019
Designed waveform generator for semiconductor equipment, plasma processing apparatus, method of controlling plasma processing apparatus, and method of manufacturing semiconductor device
SAMSUNG ELECTRONICS CO LTD39 citations93
US9306488B2Apr 5, 2016
Dual inverter system and method of controlling the same
SAMSUNG ELECTRONICS CO LTD3 citations68
US10627206B2Apr 21, 2020
Sensor module for detecting a process environment in semiconductor equipment, a semiconductor manufacturing apparatus, and a method of manufacturing a semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations46
US10281520B2May 7, 2019
Diagnosing an abnormal state of a substrate-processing apparatus
SAMSUNG ELECTRONICS CO LTD0 citations45
US9843284B2Dec 12, 2017
System for controlling fault tolerance
SAMSUNG ELECTRONICS CO LTD0 citations38