Inventor

KIYOTA TETSUJI

JP2 patents

⚠️ This page may combine multiple inventors who share the name “KIYOTA TETSUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ULVAC INC

1 patent

US6280585B1Aug 28, 2001

Sputtering apparatus for filling pores of a circular substrate

ULVAC INC71 citations91

ULVAC CORP

1 patent

US5770025AJun 23, 1998

Magnetron sputtering apparatus

ULVAC CORP48 citations86