Inventor
OKURA TAKAHIRO
JP2 patents
Patents
2 patentsUS7033679B2Apr 25, 2006
Metal film and metal film-coated member, metal oxide film and metal oxide film-coated member, thin film forming apparatus and thin film forming method for producing metal film and metal oxide film
KYOCERA OPTEC CO LTD19 citations85
USRE41747ESep 21, 2010
Metal film and metal film-coated member, metal oxide film and metal oxide film-coated member, thin film forming apparatus and thin film forming method for producing metal film and metal oxide film
KYOCERA OPTEC CO LTD0 citations44