Inventor

CHEUNG CRISTINA

US2 patents

Patents

2 patents

US6597463B1Jul 22, 2003

System to determine suitability of sion arc surface for DUV resist patterning

ADVANCED MICRO DEVICES INC31 citations89

US6630361B1Oct 7, 2003

Use of scatterometry for in-situ control of gaseous phase chemical trim process

ADVANCED MICRO DEVICES INC19 citations83