Inventor
GLATZEL HOLGER K
US6 patents
Patents
6 patentsUS6904073B2Jun 7, 2005
High power deep ultraviolet laser with long life optics
CYMER INC78 citations95
US6795474B2Sep 21, 2004
Gas discharge laser with improved beam path
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US6912052B2Jun 28, 2005
Gas discharge MOPA laser spectral analysis module
CYMER INC22 citations91
US6894785B2May 17, 2005
Gas discharge MOPA laser spectral analysis module
CYMER INC11 citations72
US6839372B2Jan 4, 2005
Gas discharge ultraviolet laser with enclosed beam path with added oxidizer
CYMER INC8 citations68
US7292343B2Nov 6, 2007
Gas discharge MOPA laser spectral analysis module
CYMER INC4 citations61