Inventor
SEN SOOVA
US4 patents
Patents
4 patentsUS7500445B2Mar 10, 2009
Method and apparatus for cleaning a CVD chamber
APPLIED MATERIALS INC187 citations98
US7464717B2Dec 16, 2008
Method for cleaning a CVD chamber
APPLIED MATERIALS INC8 citations72
US7654224B2Feb 2, 2010
Method and apparatus for cleaning a CVD chamber
APPLIED MATERIALS INC1 citations61
US7465357B2Dec 16, 2008
Computer-readable medium that contains software for executing a method for cleaning a CVD chamber
APPLIED MATERIALS INC0 citations51