Inventor
VIGLIOTTI DONALD R
US4 patents
Patents
4 patentsUS5368054ANov 29, 1994
Ultrasonic jet semiconductor wafer cleaning apparatus
IBM109 citations95
US5562778AOct 8, 1996
Ultrasonic jet semiconductor wafer cleaning method
IBM50 citations93
US4497692AFeb 5, 1985
Laser-enhanced jet-plating and jet-etching: high-speed maskless patterning method
IBM110 citations93
US5229322AJul 20, 1993
Method of making low resistance substrate or buried layer contact
IBM13 citations72