Inventor
HSU HUNG-JUNG
TW4 patents
⚠️ This page may combine multiple inventors who share the name “HSU HUNG-JUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
3 patentsUS11632849B2Apr 18, 2023
Method and apparatus for mitigating contamination
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12001143B2Jun 4, 2024
Lithography exposure system with debris removing mechanism
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations55
US11754928B2Sep 12, 2023
Lithography exposure method with debris removing mechanism
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations55