Inventor
EHBERGER DOMINIK PATRICK
DE2 patents
Patents
2 patentsUS11545338B2Jan 3, 2023
Charged particle beam apparatus and method of controlling sample charge
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH1 citations56
US12451322B2Oct 21, 2025
Method of forming a multipole device, method of influencing an electron beam, and multipole device
ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH0 citations51