Inventor
SAKIMA HIROMI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “SAKIMA HIROMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS5556500ASep 17, 1996
Plasma etching apparatus
TOKYO ELECTRON LTD191 citations97
US6159862ADec 12, 2000
Semiconductor processing method and system using C5 F8
TOKYO ELECTRON LTD86 citations94
US6465359B2Oct 15, 2002
Etchant for use in a semiconductor processing method and system
TOKYO ELECTRON LTD22 citations91
US7481230B2Jan 27, 2009
Plasma processing method and apparatus
TOKYO ELECTRON LTD7 citations71