Inventor

KANBARA HIROMITSU

JP3 patents

⚠️ This page may combine multiple inventors who share the name “KANBARA HIROMITSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US5556500ASep 17, 1996

Plasma etching apparatus

TOKYO ELECTRON LTD191 citations97

US6553277B1Apr 22, 2003

Method and apparatus for vacuum treatment

TOKYO ELECTRON LTD89 citations94

NIPPON TELEGRAPH & TELEPHONE

1 patent

US5785877AJul 28, 1998

Dry etching method

NIPPON TELEGRAPH & TELEPHONE29 citations91