Inventor
MOTOKI YASUNARI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “MOTOKI YASUNARI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
5 patentsUS4938839AJul 3, 1990
Method of removing photoresist on a semiconductor wafer
FUJITSU LTD50 citations92
US5364519ANov 15, 1994
Microwave plasma processing process and apparatus
FUJITSU LTD30 citations91
US4987284AJan 22, 1991
Downstream microwave plasma processing apparatus having an improved coupling structure between microwave plasma
FUJITSU LTD52 citations91
US4637146AJan 20, 1987
Spin dryer
FUJITSU LTD22 citations79
USRE36224EJun 8, 1999
Microwave plasma processing process and apparatus
FUJITSU LTD1 citations50