Inventor

AZUMA JUNZO

JP9 patents

⚠️ This page may combine multiple inventors who share the name “AZUMA JUNZO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

2 patents

US6734687B1May 11, 2004

Apparatus for detecting defect in device and method of detecting defect

HITACHI LTD134 citations98

US7301146B2Nov 27, 2007

Probe driving method, and probe apparatus

HITACHI LTD8 citations73

HITACHI ULSI SYS CO LTD

2 patents

US6960765B2Nov 1, 2005

Probe driving method, and probe apparatus

HITACHI ULSI SYS CO LTD50 citations96

US6970004B2Nov 29, 2005

Apparatus for inspecting defects of devices and method of inspecting defects

HITACHI ULSI SYS CO LTD18 citations92

TSUNETA RURIKO

1 patent

US8442300B2May 14, 2013

Specified position identifying method and specified position measuring apparatus

TSUNETA RURIKO6 citations70

HITACHI HIGH TECH CORP

1 patent

US12198892B2Jan 14, 2025

Sample holder and charged particle beam apparatus

HITACHI HIGH TECH CORP0 citations62

HITACHI HIGH TECH SCIENCE CORP

1 patent

US11600463B2Mar 7, 2023

Cross-section observation device, and control method

HITACHI HIGH TECH SCIENCE CORP0 citations50

YAGUCHI TOSHIE

1 patent

US9099281B2Aug 4, 2015

Charged particle radiation apparatus, and method for displaying three-dimensional information in charged particle radiation apparatus

YAGUCHI TOSHIE1 citations49

KAGA HIROYASU

1 patent

US8399863B2Mar 19, 2013

Charged particle beam apparatus using an electrostatic lens gun

KAGA HIROYASU0 citations45