Inventor
ARTEMIEV NIKOLAY
US8 patents
⚠️ This page may combine multiple inventors who share the name “ARTEMIEV NIKOLAY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
6 patentsUS11333621B2May 17, 2022
Methods and systems for semiconductor metrology based on polychromatic soft X-Ray diffraction
KLA TENCOR CORP10 citations85
US10481111B2Nov 19, 2019
Calibration of a small angle X-ray scatterometry based metrology system
KLA TENCOR CORP11 citations81
US10859518B2Dec 8, 2020
X-ray zoom lens for small angle x-ray scatterometry
KLA TENCOR CORP5 citations72
US11073487B2Jul 27, 2021
Methods and systems for characterization of an x-ray beam with high spatial resolution
KLA TENCOR CORP3 citations71
US10816486B2Oct 27, 2020
Multilayer targets for calibration and alignment of X-ray based measurement systems
KLA TENCOR CORP2 citations71
US10359377B2Jul 23, 2019
Beam shaping slit for small spot size transmission small angle X-ray scatterometry
KLA TENCOR CORP5 citations70