Inventor
WITMAN DAVID F
US13 patents
Patents
13 patentsUS4840923AJun 20, 1989
Simultaneous multiple level interconnection process
IBM137 citations97
US4744615AMay 17, 1988
Laser beam homogenizer
IBM235 citations97
US5534094AJul 9, 1996
Method for fabricating multi-layer thin film structure having a separation layer
IBM54 citations94
US5258236ANov 2, 1993
Multi-layer thin film structure and parallel processing method for fabricating same
IBM92 citations94
US5059512AOct 22, 1991
Ultraviolet light sensitive photoinitiator compositions, use thereof and radiation sensitive compositions
IBM27 citations92
US5286599AFeb 15, 1994
Base developable negative photoresist composition and use thereof
IBM23 citations91
US4782008ANov 1, 1988
Plasma-resistant polymeric material, preparation thereof, and use thereof
IBM33 citations91
US5115095AMay 19, 1992
Epoxy functional organosilicon polymer
IBM7 citations74
US5110711AMay 5, 1992
Method for forming a pattern
IBM9 citations74
US5098816AMar 24, 1992
Method for forming a pattern of a photoresist
IBM10 citations74
US4770947ASep 13, 1988
Multiple density mask and fabrication thereof
IBM7 citations73
US4981909AJan 1, 1991
Plasma-resistant polymeric material, preparation thereof, and use thereof
IBM12 citations72
US5238773AAug 24, 1993
Alkaline developable photoresist composition containing radiation sensitive organosilicon compound with quinone diazide terminal groups
IBM5 citations62