Inventor
MORI KEIICHIRO
JP10 patents
⚠️ This page may combine multiple inventors who share the name “MORI KEIICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMCO CORP
7 patentsUS10718720B2Jul 21, 2020
Semiconductor wafer evaluation method and semiconductor wafer
SUMCO CORP2 citations70
US10422756B2Sep 24, 2019
Semiconductor wafer evaluation method and semiconductor wafer
SUMCO CORP4 citations70
US9633913B2Apr 25, 2017
Method of evaluating epitaxial wafer
SUMCO CORP6 citations70
US11948819B2Apr 2, 2024
Method of evaluating silicon wafer, method of evaluating silicon wafer manufacturing process, method of manufacturing silicon wafer, and silicon wafer
SUMCO CORP0 citations60
US10895538B2Jan 19, 2021
Method of preparing sample surface, method of analyzing sample surface, field-enhanced oxidation probe, and scanning probe microscope including field-enhanced oxidation probe
SUMCO CORP0 citations48
US12188880B2Jan 7, 2025
Method of calibrating coordinate position identification accuracy of laser surface inspection apparatus and method of evaluating semiconductor wafer
SUMCO CORP0 citations46
US12247927B2Mar 11, 2025
Method of evaluating semiconductor wafer
SUMCO CORP0 citations40