Inventor
CHENG TE-EN
TW10 patents
Patents
10 patentsUS10304677B2May 28, 2019
Low-k feature formation processes and structures formed thereby
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations82
US11205597B2Dec 21, 2021
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations66
US12506001B2Dec 23, 2025
Low-K feature formation processes and structures formed thereby
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11705327B2Jul 18, 2023
Low-k feature formation processes and structures formed thereby
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11295948B2Apr 5, 2022
Low-K feature formation processes and structures formed thereby
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10950431B2Mar 16, 2021
Low-k feature formation processes and structures formed thereby
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12550402B2Feb 10, 2026
Nanostructure field-effect transistor device and method of forming
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US12237399B2Feb 25, 2025
Nano-FET transistor with alternating nanostructures and method of forming thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US12107145B2Oct 1, 2024
Densified gate spacers and formation thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10847634B2Nov 24, 2020
Field effect transistor and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51