Inventor

KOIZUMI TAICHI

JP10 patents

Patents

10 patents

US5169494ADec 8, 1992

Fine pattern forming method

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD93 citations96

US4976818ADec 11, 1990

Fine pattern forming method

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD66 citations96

US5057689AOct 15, 1991

Scanning electron microscope and a method of displaying cross sectional profiles using the same

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD63 citations94

US5756242AMay 26, 1998

Method of forming a resist pattern utilizing correlation between latent image height, resist pattern linewidth and exposure parameter

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD34 citations92

US5306601AApr 26, 1994

Fine pattern forming material and pattern forming method

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD14 citations74

US5030549AJul 9, 1991

Fine pattern forming method

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD10 citations74

US4936951AJun 26, 1990

Method of reducing proximity effect in electron beam resists

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD13 citations74

US5763124AJun 9, 1998

Method of forming a resist pattern utilizing correlation between latent image height, resist pattern linewidth and thermal annealing parameter

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD5 citations73

US5275921AJan 4, 1994

Pattern forming process

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD3 citations62

US6977133B2Dec 20, 2005

Photomask and pattern forming method

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD1 citations51