Inventor
TARABRIN SERGEY
NL9 patents
Patents
9 patentsUS10795269B2Oct 6, 2020
Method of determining a value of a parameter of interest, method of cleaning a signal containing information about a parameter of interest, device manufacturing method
ASML NETHERLANDS BV3 citations70
US12105432B2Oct 1, 2024
Metrology method and associated computer product
ASML NETHERLANDS BV2 citations65
US10599048B2Mar 24, 2020
Metrology apparatus, method of measuring a structure, device manufacturing method
ASML NETHERLANDS BV1 citations61
US11042100B2Jun 22, 2021
Measurement apparatus and method of measuring a target
ASML NETHERLANDS BV0 citations60
US10598483B2Mar 24, 2020
Metrology method, apparatus and computer program
ASML NETHERLANDS BV1 citations60
US11409204B2Aug 9, 2022
Method and apparatus to determine a patterning process parameter
ASML NETHERLANDS BV0 citations59
US10691031B2Jun 23, 2020
Method and apparatus to determine a patterning process parameter
ASML NETHERLANDS BV1 citations59
US11150563B2Oct 19, 2021
Method of measuring a parameter of a patterning process, metrology apparatus, target
ASML NETHERLANDS BV1 citations57
US10585048B2Mar 10, 2020
Method of determining a value of a parameter of interest of a target formed by a patterning process
ASML NETHERLANDS BV0 citations36