Inventor
DI REGOLO JOSEPH A
US6 patents
⚠️ This page may combine multiple inventors who share the name “DI REGOLO JOSEPH A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
3 patentsUS10481111B2Nov 19, 2019
Calibration of a small angle X-ray scatterometry based metrology system
KLA TENCOR CORP11 citations81
US11073487B2Jul 27, 2021
Methods and systems for characterization of an x-ray beam with high spatial resolution
KLA TENCOR CORP3 citations71
US10359377B2Jul 23, 2019
Beam shaping slit for small spot size transmission small angle X-ray scatterometry
KLA TENCOR CORP5 citations70