Inventor

KISE KOUJI

JP3 patents

Patents

3 patents

US6110291AAug 29, 2000

Thin film forming apparatus using laser

MITSUBISHI ELECTRIC CORP67 citations94

US6898267B2May 24, 2005

X-ray mask

MITSUBISHI ELECTRIC CORP5 citations60

US6760400B2Jul 6, 2004

Exposing method and semiconductor device fabricated by the exposing method

MITSUBISHI ELECTRIC CORP1 citations49