Inventor
WOO MICHAEL P
US19 patents
⚠️ This page may combine multiple inventors who share the name “WOO MICHAEL P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MOTOROLA INC
17 patentsUS5451543ASep 19, 1995
Straight sidewall profile contact opening to underlying interconnect and method for making the same
MOTOROLA INC147 citations97
US4997790AMar 5, 1991
Process for forming a self-aligned contact structure
MOTOROLA INC120 citations97
US5408130AApr 18, 1995
Interconnection structure for conductive layers
MOTOROLA INC86 citations96
US5405806AApr 11, 1995
Method for forming a metal silicide interconnect in an integrated circuit
MOTOROLA INC58 citations96
US5262352ANov 16, 1993
Method for forming an interconnection structure for conductive layers
MOTOROLA INC92 citations96
US5210435AMay 11, 1993
ITLDD transistor having a variable work function
MOTOROLA INC69 citations96
US5061647AOct 29, 1991
ITLDD transistor having variable work function and method for fabricating the same
MOTOROLA INC61 citations96
US5381040AJan 10, 1995
Small geometry contact
MOTOROLA INC80 citations95
US5158910AOct 27, 1992
Process for forming a contact structure
MOTOROLA INC73 citations95
US5037777AAug 6, 1991
Method for forming a multi-layer semiconductor device using selective planarization
MOTOROLA INC69 citations95
US5498560AMar 12, 1996
Process for forming an electrically programmable read-only memory cell
MOTOROLA INC39 citations92
US5034351AJul 23, 1991
Process for forming a feature on a substrate without recessing the surface of the substrate
MOTOROLA INC45 citations92
US6686633B1Feb 3, 2004
Semiconductor device, memory cell, and processes for forming them
MOTOROLA INC16 citations91
US6184073B1Feb 6, 2001
Process for forming a semiconductor device having an interconnect or conductive film electrically insulated from a conductive member or region
MOTOROLA INC27 citations91
US5279990AJan 18, 1994
Method of making a small geometry contact using sidewall spacers
MOTOROLA INC43 citations91
US6291888B1Sep 18, 2001
Contact structure and process for formation
MOTOROLA INC15 citations84
US6037246AMar 14, 2000
Method of making a contact structure
MOTOROLA INC15 citations74