Inventor
TERASAWA NOBUTOSHI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “TERASAWA NOBUTOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS12438055B2Oct 7, 2025
Abnormality detection method and processing apparatus
TOKYO ELECTRON LTD0 citations58
US9441292B2Sep 13, 2016
Etching method, etching apparatus, and ring member
TOKYO ELECTRON LTD0 citations49
US11567485B2Jan 31, 2023
Substrate processing system and method for monitoring process data
TOKYO ELECTRON LTD0 citations42
US12411479B2Sep 9, 2025
Method and apparatus for determining cause of abnormality in a semiconductor manufacturing chamber
TOKYO ELECTRON LTD0 citations38