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Inventor
LAFONTAINE MARVIN
US
2 patents
⚠️ This page may combine multiple inventors who share the name “LAFONTAINE MARVIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AXCELIS TECH INC
1 patent
US7560705B2
Jul 14, 2009
Workpiece handling scan arm for ion implantation system
AXCELIS TECH INC
12 citations
76
GENUS INC
1 patent
US5838012A
Nov 17, 1998
Charge exchange cell
GENUS INC
1 citations
42