Inventor

PUROHIT ASHWIN

US2 patents

⚠️ This page may combine multiple inventors who share the name “PUROHIT ASHWIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VARIAN SEMICONDUCTOR EQUIPMENT

1 patent

US6690022B2Feb 10, 2004

Ion beam incidence angle and beam divergence monitor

VARIAN SEMICONDUCTOR EQUIPMENT29 citations89

AXCELIS TECH INC

1 patent

US7560705B2Jul 14, 2009

Workpiece handling scan arm for ion implantation system

AXCELIS TECH INC12 citations76