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Inventor
NIISAKA SHUNSUKE
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “NIISAKA SHUNSUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
2 patents
US6831731B2
Dec 14, 2004
Projection optical system and an exposure apparatus with the projection optical system
NIKON CORP
45 citations
92
US9915761B2
Mar 13, 2018
Optical system having optical thin film including amorphous silicon oxide-based binder
NIKON CORP
4 citations
70
ISHIZAWA HITOSHI
1 patent
US8098432B2
Jan 17, 2012
Optical multi-layer thin film, optical element, and method for producing the optical multi-layer thin film
ISHIZAWA HITOSHI
3 citations
57