Inventor
WEI YAYI
CN15 patents
⚠️ This page may combine multiple inventors who share the name “WEI YAYI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
6 patentsUS7071074B2Jul 4, 2006
Structure and method for placement, sizing and shaping of dummy structures
INFINEON TECHNOLOGIES AG19 citations91
US7662436B1Feb 16, 2010
Method of spin coating a film of non-uniform thickness
INFINEON TECHNOLOGIES AG15 citations82
US7199062B2Apr 3, 2007
Method for forming a resist film on a substrate having non-uniform topography
INFINEON TECHNOLOGIES AG9 citations72
US7868427B2Jan 11, 2011
Structure and method for placement, sizing and shaping of dummy structures
INFINEON TECHNOLOGIES AG3 citations61
US7494930B2Feb 24, 2009
Structure and method for placement, sizing and shaping of dummy structures
INFINEON TECHNOLOGIES AG2 citations61
US8921166B2Dec 30, 2014
Structure and method for placement, sizing and shaping of dummy structures
INFINEON TECHNOLOGIES AG0 citations51
INST OF MICROELECTRONICS CAS
5 patentsUS12222641B2Feb 11, 2025
Method and device for optimizing mask parameters
INST OF MICROELECTRONICS CAS0 citations56
US12198930B2Jan 14, 2025
Method for manufacturing semiconductor device
INST OF MICROELECTRONICS CAS0 citations56
US12237213B2Feb 25, 2025
Method for manufacturing semiconductor device
INST OF MICROELECTRONICS CAS0 citations51
US12535742B2Jan 27, 2026
Method and apparatus for correcting proximity effect of electron beam
INST OF MICROELECTRONICS CAS0 citations49
US12541154B2Feb 3, 2026
Optical method and apparatus for quickly realizing precise calibration of lithography system
INST OF MICROELECTRONICS CAS0 citations41