Inventor
HOUBEN KELLY
BE7 patents
Patents
7 patentsUS10460932B2Oct 29, 2019
Semiconductor device with amorphous silicon filled gaps and methods for forming
ASM IP HOLDING BV3 citations71
US11230766B2Jan 25, 2022
Substrate processing apparatus and method
ASM IP HOLDING BV3 citations70
US11501968B2Nov 15, 2022
Method for providing a semiconductor device with silicon filled gaps
ASM IP HOLDING BV4 citations66
US11646204B2May 9, 2023
Method for forming a layer provided with silicon
ASM IP HOLDING BV0 citations59
US12387930B2Aug 12, 2025
Method and wafer processing furnace for forming an epitaxial stack of semiconductor epitaxial layers on a plurality of substrates
ASM IP HOLDING BV0 citations48
US12362174B2Jul 15, 2025
Method and wafer processing furnace for forming an epitaxial stack on a plurality of substrates
ASM IP HOLDING BV0 citations44
US10453685B2Oct 22, 2019
Forming semiconductor device by providing an amorphous silicon core with a hard mask layer
ASM IP HOLDING BV0 citations40