Inventor
KUO PAO-LING
TW4 patents
Patents
4 patentsUS5454871AOct 3, 1995
SOG coated apparatus to solve SOG non-uniformity in the VLSI process
TAIWAN SEMICONDUCTOR MFG65 citations94
US6303509B1Oct 16, 2001
Method to calibrate the wafer transfer for oxide etcher (with clamp)
TAIWAN SEMICONDUCTOR MFG35 citations90
US5371046ADec 6, 1994
Method to solve sog non-uniformity in the VLSI process
TAIWAN SEMICONDUCTOR MFG10 citations72
US6531326B2Mar 11, 2003
Method to calibrate the wafer transfer for oxide etcher (with clamp)
TAIWAN SEMICONDUCTOR MFG4 citations60