Inventor
PANT ANIL K
US14 patents
⚠️ This page may combine multiple inventors who share the name “PANT ANIL K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
10 patentsUS5762536AJun 9, 1998
Sensors for a linear polisher
LAM RES CORP150 citations98
US5871390AFeb 16, 1999
Method and apparatus for aligning and tensioning a pad/belt used in linear planarization for chemical mechanical polishing
LAM RES CORP75 citations96
US5916012AJun 29, 1999
Control of chemical-mechanical polishing rate across a substrate surface for a linear polisher
LAM RES CORP112 citations95
US6328642B1Dec 11, 2001
Integrated pad and belt for chemical mechanical polishing
LAM RES CORP66 citations94
US6325706B1Dec 4, 2001
Use of zeta potential during chemical mechanical polishing for end point detection
LAM RES CORP54 citations92
US6186865B1Feb 13, 2001
Apparatus and method for performing end point detection on a linear planarization tool
LAM RES CORP38 citations92
US6416385B2Jul 9, 2002
Method and apparatus for polishing semiconductor wafers
LAM RES CORP16 citations91
US6224461B1May 1, 2001
Method and apparatus for stabilizing the process temperature during chemical mechanical polishing
LAM RES CORP44 citations91
US6425812B1Jul 30, 2002
Polishing head for chemical mechanical polishing using linear planarization technology
LAM RES CORP13 citations73
US6656025B2Dec 2, 2003
Integrated pad and belt for chemical mechanical polishing
LAM RES CORP5 citations72
PLANAR LABS CORP
3 patentsUS6722950B1Apr 20, 2004
Method and apparatus for electrodialytic chemical mechanical polishing and deposition
PLANAR LABS CORP67 citations94
US6773337B1Aug 10, 2004
Method and apparatus to recondition an ion exchange polish pad
PLANAR LABS CORP5 citations61
US6905526B1Jun 14, 2005
Fabrication of an ion exchange polish pad
PLANAR LABS CORP0 citations51