Inventor
BREIVOGEL JOSEPH R
US10 patents
⚠️ This page may combine multiple inventors who share the name “BREIVOGEL JOSEPH R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEL CORP
7 patentsUS5635083AJun 3, 1997
Method and apparatus for chemical-mechanical polishing using pneumatic pressure applied to the backside of a substrate
INTEL CORP169 citations98
US5554064ASep 10, 1996
Orbital motion chemical-mechanical polishing apparatus and method of fabrication
INTEL CORP149 citations97
US5547417AAug 20, 1996
Method and apparatus for conditioning a semiconductor polishing pad
INTEL CORP152 citations97
US5216843AJun 8, 1993
Polishing pad conditioning apparatus for wafer planarization process
INTEL CORP390 citations96
US5212910AMay 25, 1993
Composite polishing pad for semiconductor process
INTEL CORP349 citations95
US6095904AAug 1, 2000
Orbital motion chemical-mechanical polishing method and apparatus
INTEL CORP17 citations91
US6083089AJul 4, 2000
Method and apparatus for chemical mechanical polishing
INTEL CORP11 citations73
LAM RES CORP
3 patentsUS5762536AJun 9, 1998
Sensors for a linear polisher
LAM RES CORP150 citations98
US5871390AFeb 16, 1999
Method and apparatus for aligning and tensioning a pad/belt used in linear planarization for chemical mechanical polishing
LAM RES CORP75 citations96
US5916012AJun 29, 1999
Control of chemical-mechanical polishing rate across a substrate surface for a linear polisher
LAM RES CORP112 citations95