Inventor

PAYNE MAKONNEN

US4 patents

⚠️ This page may combine multiple inventors who share the name “PAYNE MAKONNEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ENTEGRIS INC

2 patents

US10790187B2Sep 29, 2020

Post-etch residue removal for advanced node beol processing

ENTEGRIS INC0 citations48

US10577567B2Mar 3, 2020

Cleaning compositions for removing post etch residue

ENTEGRIS INC0 citations48

COOPER EMANUEL I

1 patent

US9416338B2Aug 16, 2016

Composition for and method of suppressing titanium nitride corrosion

COOPER EMANUEL I10 citations78

PAYNE MAKONNEN

1 patent

US9031700B2May 12, 2015

Facilities manifold with proximity sensor

PAYNE MAKONNEN4 citations63