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Inventor
SHIMOMOTO TAKASHI
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “SHIMOMOTO TAKASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DAIHEN CORP
2 patents
US9059680B2
Jun 16, 2015
Impedance adjusting apparatus
DAIHEN CORP
8 citations
80
US9270250B2
Feb 23, 2016
High frequency matching system
DAIHEN CORP
4 citations
69
TOKYO ELECTRON LTD
1 patent
US9831064B2
Nov 28, 2017
Plasma processing apparatus
TOKYO ELECTRON LTD
50 citations
88