Inventor

ZERNICKEL DIETER

DE6 patents

⚠️ This page may combine multiple inventors who share the name “ZERNICKEL DIETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

STEAG RTP SYSTEMS

1 patent

US6005226ADec 21, 1999

Rapid thermal processing (RTP) system with gas driven rotating substrate

STEAG RTP SYSTEMS121 citations93

STEAG AST

1 patent

US5870526AFeb 9, 1999

Inflatable elastomeric element for rapid thermal processing (RTP) system

STEAG AST28 citations88

MATTSON TECH INC

1 patent

US7037797B1May 2, 2006

Localized heating and cooling of substrates

MATTSON TECH INC27 citations86

MATTSON TECHNOLOGY CORP

1 patent

US6449428B2Sep 10, 2002

Gas driven rotating susceptor for rapid thermal processing (RTP) system

MATTSON TECHNOLOGY CORP38 citations86

STEAG RTP SYSTEMS GMBH

1 patent

US6752625B1Jun 22, 2004

Method and apparatus device for the heat treatment of substrates

STEAG RTP SYSTEMS GMBH11 citations71

CENTROTHERM PHOTOVOLTAICS AG

1 patent

US10024719B2Jul 17, 2018

Measurement object, method for the production thereof and device for the thermal treatment of substrates

CENTROTHERM PHOTOVOLTAICS AG0 citations48