Inventor
FICHTL ROBERT
DE2 patents
Patents
2 patentsUS11980990B2May 14, 2024
Method for machining a workpiece in the production of an optical element
ZEISS CARL SMT GMBH0 citations47
US10146138B2Dec 4, 2018
Method for producing an optical element for an optical system, in particular for a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH1 citations47