Inventor
YING CHENTSAU CHRIS
US13 patents
Patents
13 patentsUS9852916B2Dec 26, 2017
Single platform, multiple cycle spacer deposition and etch
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US9406522B2Aug 2, 2016
Single platform, multiple cycle spacer deposition and etch
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US12201030B2Jan 14, 2025
Spin-orbit torque MRAM structure and manufacture thereof
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US11723283B2Aug 8, 2023
Spin-orbit torque MRAM structure and manufacture thereof
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US11682556B2Jun 20, 2023
Methods of improving graphene deposition for processes using microwave surface-wave plasma on dielectric materials
APPLIED MATERIALS INC0 citations62
US11289331B2Mar 29, 2022
Methods for graphene formation using microwave surface-wave plasma on dielectric materials
APPLIED MATERIALS INC0 citations62
US11145808B2Oct 12, 2021
Methods for etching a structure for MRAM applications
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US11566325B2Jan 31, 2023
Silicon carbonitride gapfill with tunable carbon content
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US11384428B2Jul 12, 2022
Carbon layer covered mask in 3D applications
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US12288672B2Apr 29, 2025
Methods and apparatus for carbon compound film deposition
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US11049731B2Jun 29, 2021
Methods for film modification
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US11387071B2Jul 12, 2022
Multi-source ion beam etch system
APPLIED MATERIALS INC0 citations52
US10692734B2Jun 23, 2020
Methods of patterning nickel silicide layers on a semiconductor device
APPLIED MATERIALS INC0 citations51