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Inventor

SMITH DONALD K

US59 patents
⚠️ This page may combine multiple inventors who share the name “SMITH DONALD K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED SCIENCE & TECH INC

16 patents
US6559408B2May 6, 2003

Toroidal low-field reactive gas source

APPLIED SCIENCE & TECH INC104 citations99
US6150628ANov 21, 2000

Toroidal low-field reactive gas source

APPLIED SCIENCE & TECH INC458 citations99
US6924455B1Aug 2, 2005

Integrated plasma chamber and inductively-coupled toroidal plasma source

APPLIED SCIENCE & TECH INC82 citations98
US6388226B1May 14, 2002

Toroidal low-field reactive gas source

APPLIED SCIENCE & TECH INC117 citations98
US5501740AMar 26, 1996

Microwave plasma reactor

APPLIED SCIENCE & TECH INC483 citations98
US6552296B2Apr 22, 2003

Toroidal low-field reactive gas source

APPLIED SCIENCE & TECH INC62 citations96
US6486431B1Nov 26, 2002

Toroidal low-field reactive gas source

APPLIED SCIENCE & TECH INC56 citations96
US5206471AApr 27, 1993

Microwave activated gas generator

APPLIED SCIENCE & TECH INC52 citations96
US5556475ASep 17, 1996

Microwave plasma reactor

APPLIED SCIENCE & TECH INC52 citations95
US5688382ANov 18, 1997

Microwave plasma deposition source and method of filling high aspect-ratio features on a substrate

APPLIED SCIENCE & TECH INC68 citations94
US5153406AOct 6, 1992

Microwave source

APPLIED SCIENCE & TECH INC29 citations93
US6664497B2Dec 16, 2003

Toroidal low-field reactive gas source

APPLIED SCIENCE & TECH INC26 citations92
US5625259AApr 29, 1997

Microwave plasma applicator with a helical fluid cooling channel surrounding a microwave transparent discharge tube

APPLIED SCIENCE & TECH INC25 citations90
US5621331AApr 15, 1997

Automatic impedance matching apparatus and method

APPLIED SCIENCE & TECH INC60 citations89
US5142198AAug 25, 1992

Microwave reactive gas discharge device

APPLIED SCIENCE & TECH INC7 citations74
US5568015AOct 22, 1996

Fluid-cooled dielectric window for a plasma system

APPLIED SCIENCE & TECH INC18 citations71

ENERGETIQ TECHNOLOGY INC

11 patents

MKS INSTR INC

8 patents

SMITH DONALD K

4 patents

APPLIED SCIENCE & TECHNOLOGY I

3 patents

HOLBER WILLIAM M

2 patents

HAMAMATSU PHOTONICS KK

2 patents

BAYER AG

2 patents

ENERGETIQ TECH INC

1 patent

GUARANTEED BAFFLE CO INC

1 patent

Showing the top 50 of 59 patents by PatentIndex Score.