Inventor
SMITH DONALD K
US59 patents
⚠️ This page may combine multiple inventors who share the name “SMITH DONALD K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED SCIENCE & TECH INC
16 patentsUS6559408B2May 6, 2003
Toroidal low-field reactive gas source
APPLIED SCIENCE & TECH INC104 citations99
US6150628ANov 21, 2000
Toroidal low-field reactive gas source
APPLIED SCIENCE & TECH INC458 citations99
US6924455B1Aug 2, 2005
Integrated plasma chamber and inductively-coupled toroidal plasma source
APPLIED SCIENCE & TECH INC82 citations98
US6388226B1May 14, 2002
Toroidal low-field reactive gas source
APPLIED SCIENCE & TECH INC117 citations98
US5501740AMar 26, 1996
Microwave plasma reactor
APPLIED SCIENCE & TECH INC483 citations98
US6552296B2Apr 22, 2003
Toroidal low-field reactive gas source
APPLIED SCIENCE & TECH INC62 citations96
US6486431B1Nov 26, 2002
Toroidal low-field reactive gas source
APPLIED SCIENCE & TECH INC56 citations96
US5206471AApr 27, 1993
Microwave activated gas generator
APPLIED SCIENCE & TECH INC52 citations96
US5556475ASep 17, 1996
Microwave plasma reactor
APPLIED SCIENCE & TECH INC52 citations95
US5688382ANov 18, 1997
Microwave plasma deposition source and method of filling high aspect-ratio features on a substrate
APPLIED SCIENCE & TECH INC68 citations94
US5153406AOct 6, 1992
Microwave source
APPLIED SCIENCE & TECH INC29 citations93
US6664497B2Dec 16, 2003
Toroidal low-field reactive gas source
APPLIED SCIENCE & TECH INC26 citations92
US5625259AApr 29, 1997
Microwave plasma applicator with a helical fluid cooling channel surrounding a microwave transparent discharge tube
APPLIED SCIENCE & TECH INC25 citations90
US5621331AApr 15, 1997
Automatic impedance matching apparatus and method
APPLIED SCIENCE & TECH INC60 citations89
US5142198AAug 25, 1992
Microwave reactive gas discharge device
APPLIED SCIENCE & TECH INC7 citations74
US5568015AOct 22, 1996
Fluid-cooled dielectric window for a plasma system
APPLIED SCIENCE & TECH INC18 citations71
ENERGETIQ TECHNOLOGY INC
11 patentsUS9185786B2Nov 10, 2015
Laser-driven light source
ENERGETIQ TECHNOLOGY INC31 citations98
US9048000B2Jun 2, 2015
High brightness laser-driven light source
ENERGETIQ TECHNOLOGY INC33 citations98
US8969841B2Mar 3, 2015
Light source for generating light from a laser sustained plasma in a above-atmospheric pressure chamber
ENERGETIQ TECHNOLOGY INC33 citations98
US7786455B2Aug 31, 2010
Laser-driven light source
ENERGETIQ TECHNOLOGY INC85 citations98
US7435982B2Oct 14, 2008
Laser-driven light source
ENERGETIQ TECHNOLOGY INC101 citations98
US7307375B2Dec 11, 2007
Inductively-driven plasma light source
ENERGETIQ TECHNOLOGY INC86 citations97
US7948185B2May 24, 2011
Inductively-driven plasma light source
ENERGETIQ TECHNOLOGY INC53 citations96
US7989786B2Aug 2, 2011
Laser-driven light source
ENERGETIQ TECHNOLOGY INC53 citations95
US7569791B2Aug 4, 2009
Inductively-driven plasma light source
ENERGETIQ TECHNOLOGY INC6 citations63
US7199384B2Apr 3, 2007
Inductively-driven light source for lithography
ENERGETIQ TECHNOLOGY INC2 citations62
US7183717B2Feb 27, 2007
Inductively-driven light source for microscopy
ENERGETIQ TECHNOLOGY INC3 citations62
MKS INSTR INC
8 patentsUS7161112B2Jan 9, 2007
Toroidal low-field reactive gas source
MKS INSTR INC45 citations96
US7569790B2Aug 4, 2009
Method and apparatus for processing metal bearing gases
MKS INSTR INC19 citations93
US7541558B2Jun 2, 2009
Inductively-coupled toroidal plasma source
MKS INSTR INC34 citations92
US6932098B2Aug 23, 2005
Apparatus and method for pressure fluctuation insensitive mass flow control
MKS INSTR INC33 citations92
US6508631B1Jan 21, 2003
Radial flow turbomolecular vacuum pump
MKS INSTR INC33 citations92
US6687635B2Feb 3, 2004
Apparatus and method for compensated sensor output
MKS INSTR INC32 citations89
US6781119B2Aug 24, 2004
Ion storage system
MKS INSTR INC10 citations73
US7238266B2Jul 3, 2007
Method and apparatus for fluorine generation and recirculation
MKS INSTR INC4 citations63
SMITH DONALD K
4 patentsUS8143790B2Mar 27, 2012
Method for inductively-driven plasma light source
SMITH DONALD K57 citations96
US8309943B2Nov 13, 2012
Laser-driven light source
SMITH DONALD K42 citations95
US8525138B2Sep 3, 2013
Laser-driven light source
SMITH DONALD K56 citations94
USD751348SMar 15, 2016
Self-leveling bean bag coaster
SMITH DONALD K13 citations84
APPLIED SCIENCE & TECHNOLOGY I
3 patentsUS5637279AJun 10, 1997
Ozone and other reactive gas generator cell and system
APPLIED SCIENCE & TECHNOLOGY I70 citations95
US4866346ASep 12, 1989
Microwave plasma generator
APPLIED SCIENCE & TECHNOLOGY I94 citations95
US4851630AJul 25, 1989
Microwave reactive gas generator
APPLIED SCIENCE & TECHNOLOGY I35 citations92
HOLBER WILLIAM M
2 patentsHAMAMATSU PHOTONICS KK
2 patentsBAYER AG
2 patentsENERGETIQ TECH INC
1 patentGUARANTEED BAFFLE CO INC
1 patentShowing the top 50 of 59 patents by PatentIndex Score.