P

Inventor

NAKAGAWA MINE

JP4 patents
⚠️ This page may combine multiple inventors who share the name “NAKAGAWA MINE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI HIGH TECH CORP

3 patents
US6963069B2Nov 8, 2005

Charged particle beam device

HITACHI HIGH TECH CORP11 citations71
US7456403B2Nov 25, 2008

Charged particle beam device

HITACHI HIGH TECH CORP3 citations60
US7964845B2Jun 21, 2011

Charged particle beam device

HITACHI HIGH TECH CORP0 citations49

HITACHI SCIENCE SYSTEMS INC

1 patent
US6963067B2Nov 8, 2005

Scanning electron microscope and sample observing method using it

HITACHI SCIENCE SYSTEMS INC20 citations87